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Product Features
● Industrial production line AFM: high speed, precision, good rigidity, perfect adaptation to industrial scene requirements;
● FPGA high-speed scanning imaging control system combined with three-axis discrete piezoelectric scanner;
● Wide scanning range and high measurement accuracy;
● Symmetrical high-strength piezoelectric stack, good rigidity, low noise, high-precision strain sensor, nanometer-level positioning, sub-nanometer resolution;
Piezoelectric Translation Stage
FPGA high-speed scanning imaging
Wafer defect inspection
Keyword： Industrial Atomic Force Microscope AFM-Semi Tech20
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